The monograph focuses on the design variations of oil-free vacuum pumps and their pumping characteristics. It describes computational procedures of working processes for volume displacement pumps and the mathematical model of working process for an oil-free claw vacuum pump. The monograph describes the experimental study of pump characteristics and presents indicator and temperature diagrams. The gas flow in the pump inlet and outlet ducts is studied both mathematically and experimentally. The influence of the pump configurations on the pumping characteristics is analyzed. The monograph is designed for students majoring in Vacuum Engineering for the courses “Rotor machines” and “Dynamic machines”. The monograph was developed at the Department of Vacuum Engineering.